Download e-book for iPad: Chemical Vapor Deposition of Tungsten and Tungsten Silicides by John E. J. Schmitz

By John E. J. Schmitz

ISBN-10: 0815512880

ISBN-13: 9780815512882

This monograph condenses the proper and pertinent literature on blanket and selective CVD of tungsten (W) right into a unmarried achievable quantity. The ebook provides the reader with the mandatory historical past to increase, superb song, and effectively preserve a CVD-W method in a construction set-up. fabrics deposition chemistry, apparatus, method know-how, advancements, and functions are described.

Show description

Read Online or Download Chemical Vapor Deposition of Tungsten and Tungsten Silicides for VLSI/ ULSI Applications (Materials Science and Process Technology) PDF

Best electrical engineering books

Download e-book for iPad: Broadband Planar Antennas: Design and Applications by Zhi Ning Chen,Michael Yan Wah Chia

The expanding call for for instant communications has revolutionised the approach to life of today’s society and one of many key elements of instant know-how is antenna design.  Broadband planar antennas are the latest iteration of antennas boasting the sexy positive factors required, comparable to large working bandwidth, low profile, mild weight, comparatively cheap and straightforwardness of integration into arrays or Radio Frequency (RF) circuits, to lead them to perfect elements of recent communications platforms.

Get Fuzzy Logik. Ein kurzer Überblick (German Edition) PDF

Studienarbeit aus dem Jahr 2008 im Fachbereich Elektrotechnik, observe: 1. zero, Hochschule für Technik und Wirtschaft Berlin, nine Quellen im Literaturverzeichnis, Sprache: Deutsch, summary: Eine präzise und vollständige Systemmodellierung ist heutzutage in vielen Anwendungsfällen nicht praktikabel bzw. sogar unmöglich.

Download e-book for iPad: Hydrodynamic Control of Wave Energy Devices by Umesh A. Korde,John Ringwood

With this self-contained and accomplished textual content, scholars and researchers will achieve an in depth realizing of the basic facets of the hydrodynamic keep watch over of wave strength converters. Such keep watch over is important to maximize strength seize for a given equipment configuration and performs an enormous position in efforts to make wave power monetary.

Download e-book for iPad: Analysis: Analysis: Volume 1 (De Gruyter Textbook) by Weigang Zhang

The booklet starts off via introducing indications and structures, after which discusses Time-Domain research and Frequency-Domain research for Continuous-Time structures. It additionally covers Z-transform, state-space research and method synthesis. the writer presents considerable examples and routines to facilitate studying, getting ready scholars for next classes on circuit research and conversation thought.

Extra info for Chemical Vapor Deposition of Tungsten and Tungsten Silicides for VLSI/ ULSI Applications (Materials Science and Process Technology)

Example text

Download PDF sample

Chemical Vapor Deposition of Tungsten and Tungsten Silicides for VLSI/ ULSI Applications (Materials Science and Process Technology) by John E. J. Schmitz


by Jeff
4.2

Rated 4.65 of 5 – based on 19 votes